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Nanometrology, evaluation techniques and quality control for high accurancy surface measurement

  1. DURAKBASA, Numan M. et al. Nanometrology, evaluation techniques and quality control for high accurancy surface measurement. In 6th Nanoscience and Nanotechnology Conference : NANOTR - VI, Izmir, June 15 -18, 2010. - Izmir : Izmir Institute of Technology, 2010, s. 154 [0,013 AH].
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