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Nanometrology, evaluation techniques and quality control for high accurancy surface measurement

  1. DURAKBASA, Numan M. - DEMIRCIOGLU, Pinar - CAKMAKCI, Mehmet - HORNÍKOVÁ, Adriana. Nanometrology, evaluation techniques and quality control for high accurancy surface measurement. In 6th Nanoscience and Nanotechnology Conference : NANOTR - VI, Izmir, June 15 -18, 2010. - Izmir : Izmir Institute of Technology, 2010, s. 154 [0,013 AH].
Number of the records: 1  

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